prov:value
| - The material of the buffer layer 14 can be selected from metals such as Ta, Hf, Si, Au, Pt, Ag, Cu, Ti, Mn, Cr and Al, including alloys and mixtures of these elements, and nonmetallic materials such as silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, silicon carbide and carbon, including mixtures of these nonmetallic materials, and mixtures of the metals and the nonmetallic materi
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