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  • The Japanese Patent Application Laid-open No.2002-003297 discloses that the elements such as Al, Ba, Be, Ca, Ce, In, La, Li, Mg, Mn, Mo, Na, Sr, Ta and Zr have the formation Gibbs' energy greater than Si in forming the sulfide, and that using a sulfide composed of one of them or a combination of them can suppress the Si interface reaction, and proposes an oxide thin film device and its fabrication
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