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  • The catalyst preferably is a metal selected from the group consisting of platinum, silver, palladium, copper, rhodium, nickel, and...http://www.google.com/patents/US5948697?utm_source=gb-gplus-sharePatent US5948697 - Catalytic acceleration and electrical bias control of CMP processingAdvanced Patent SearchPublication numberUS5948697 APublication typeGrantApplication numberUS 08/652,905Publication
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