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  • The image data host computer 88 a performs processes such as an image display, storage of the image data and an image procession. [0205]FIG. 27 shows a basic structure of an exposure apparatus to which the stage device according to the present invention is adapted to be incorporated. [0206] In FIG. 27, reference numeral 1001 denotes an illumination system which lead a laser beam entering thereto t
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