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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The tunable filter as set forth in claim 1, wherein said first through said third driving devices are a combination of two or three ones selected out of a group including an electrostatic driving device for changing said clearance between objects to be driven by changing a voltage to be applied between a pair of electrodes, an electromagnetic driving device for changing said clearance between said
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