prov:value
| - While the majority of contaminants found on wafers comprise organic molecules (consisting of carbon, hydrogen, oxygen, nitrogen, sulfur, trace metals, such as iron and sodium, and trace oxides), many other types of surface contaminants exist, such as metals (e.g., sodium, aluminum, brass and gypsum), silicon, and oxides (e.g., silicon oxide and aluminum oxide), each requiring different reaction pa
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