prov:value
| - The method of claim 1, wherein the metallic film is formed of a conductive material including at least one selected from a group consisting of aluminum, gold (Au), silver (Ag), platinum (Pt), copper (Cu), nickel (Ni), palladium (Pd), zinc (Zn), iron (Fe), chrome (Cr), molybdenum (Mo), a doped semiconductor device, carbon nanotube, fullerene, conductive plastic, and electrical conductive composite
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