About: isa:308826003   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • In one embodiment, sputtering plate 20 is comprised of at least one of aluminum and aluminum alloys, molybdenum and molybdenum alloys, copper and copper alloys, tungsten, titanium or tantalum, or any other non-magnetic metallic and non-metallic materials and alloys including carbon, carbides, silicon, silicides, germanium, germanium alloys, conductive oxides, and conductive oxide compositions.
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software