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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The scan lines 11 a may made of, for example, conductive polysilicon, a metal including at least one of refractory metals such as titanium (Ti), chrome (Cr), tungsten (W), tantalum (Ta), and molybdenum (Mo), an alloy thereof, a metal silicide, a polysilicide, or a stacked structure thereof.
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