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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The rinsed wafers are contacted with high purity ozonated water, i.e., deionized water containing ozone and having a concentration of no more than about 0.01 parts per billion (weight/volume) of each of iron, chromium, titanium and other metals which will degrade minority carrier lifetime, to produce a wafer having a hydrophilic oxide surface.
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