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  • 7, entitled ???Conductive Polishing Media For Electrochemical Mechanical Polishing???, filed on Apr. 24, 2001, which is incorporated by reference herein. [0027] The basin 202 can be a bowl shaped member made of a plastic such as fluoropolymers, TEFLON???, PFA, PE, PES, or other materials that are compatible with electroplating and electropolishing chemistries.
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