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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • light source or heated gas is used as a heat source. [0057] Furthermore, in the invention, the gettering site includes one kind of or plural kinds of element selected from the group consisting of He, Ne, Ar, Kr and Xe. [0058] Furthermore, in the invention, the gettering site includes one kind of or plural kinds of element selected from elements belonging to the 15th group in a periodic table. [005
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