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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • layer formed over said film to cover at least said channel; and a gate electrode formed on said gate insulating layer and adjacent to said channel, said gate electrode having a laminated structure comprising a first layer apart from said gate insulating layer and a second layer in contact with said gate insulating layer and said first layer, said second layer including a material selected from the
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