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  • Alternatively, where two or more actuators are used, one actuator may be used to open and the other actuator may be used to close the microvalve 10 as in the configuration of FIG. 5B. It is desirable to provide a heat sink (not shown), comprising any thermally conductive metal or ceramic, such as aluminum, for example, attached to the bottom surface of the first layer 12. [0058] Alternative config
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