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  • Illustrative examples of these materials include the same materials as those for forming the lower electrode thin film 34, namely, metals such as platinum (Pt), ruthenium (Ru), rhodium (Rh), palladium (Pd), iridium (Ir), gold (Au), silver (Ag), copper (Cu), nickel (Ni) or the like, alloys containing at least one of these metals as a principal component, conductive oxides having a perovskite struct
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