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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • c) forming an electrically insulating structure between said first and second trenches and extending continuously along at least one side of said trenches by converting said semiconductor material in said rib and along said at least one side of said trenches to an insulating material, including completely converting all of said semiconductor material of said rib to said insulating material;
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