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  • Further, in order to improve the heat resistance of the alumina thin film 3, at least one element selected from Ce, La, Pr, Nd, Ba, Ca, Li, K, Sr, Si and Zr or a compound thereof other than oxide (nitrate, chloride, sulfate, hydroxide or carbonate) may be added to the starting material in addition to the rare earth oxide. [0138] In the embodiment of the invention, Al(NO3)3 and Ce(NO3)3 may be ment
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