prov:value
| - Suitable conductive materials include, for example, copper (Cu), aluminum (Al), tungsten (W), molybdenum(Mo), titanium (Ti), gold (Au), silver (Ag), a metal silicide, a metal nitride, polysilicon, or an alloy containing one or more such conductive materials, such as an aluminum-copper (AlCu) alloy, an aluminum-silicon (AlSi) alloy, analuminum-copper-silicon (AlCuSi) alloy, and a titanium nitride (
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