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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • As the conductive material, an element such as tantalum (Ta), titanium (Ti), molybdenum (Mo), and tungsten (W); an alloy containing the above element as a main component; an alloy film in which the above elements are combined (typically, an Mo???W alloy film or an Mo???Ta alloy film); or a silicon film provided with conductivity can be used.
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