A first electrode 312 is formed within the vias 301, as depicted in FIG. 3D. The first electrode 312 can be formed by any suitable method and can be any conductive material such as e.g., titanium nitride (TiN), tantalum nitride (TaN), tungsten (W), tungsten nitride (WN), titanium aluminum nitride (TiAlN), titanium tungsten (TiW) or platinum (Pt), among others.