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  • Besides, not shown in the figure, doping may be performed twice to add another impurity region for LDD. As the impurity with the conductivity type, an element such as phosphorous or arsenic, belonging to Group 15 in the periodic table, is used in the case of an n-type impurity (donor), and an element such as boron, belonging to Group 13 in the periodic table, is used in the case of a p-type impuri
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