eeMethod of manufacturing a semiconductor device including metal contact and capacitorUS20040084746Oct 29, 2003May 6, 2004Seong-Ho KimSelf-aligned semiconductor contact structures and methods for fabricating the sameUS20050136649Aug 23, 2004Jun 23, 2005Min-Suk LeeMethod and fabricating semiconductor deviceUS20060091490Mar 10, 2005May 4, 2006Hung-Wei ChenSelf-aligned gated p-i-n diode for ultra-fas