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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • Semiconductor device and method for manufacturing the same Semiconductor device and method for manufacturing the sameDisclosed herein are a semiconductor device and a method for manufacturing the same, the semiconductor device including: trench gate electrodes formed in a semiconductor substrate; a gate insulating film covering an upper surface of the semiconductor substrate and lateral surfaces a
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