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  • Reference numerals 22 indicate contact plugs, which are of conductive plugs formed by embedding a conductive material such as tungsten (W), aluminium (Al) or the like into contact holes opened as through holes, respectively, which penetrate the interlayer insulating film 20 and thereby extend to the drain layer 8 and a boundary portion between the source layer 11 and the N+ diffusion layer 12 in t
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