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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • 02Semiconductor Energy Laboratory Co., Ltd.Semiconductor thin film and semiconductor deviceUS65010949 Jun 199831 Dec 2002Semiconductor Energy Laboratory Co., Ltd.Semiconductor device comprising a bottom gate type thin film transistorUS650417428 Mar 20007 Jan 2003Semiconductor Energy Laboratory Co., Ltd.Thin film transistor; crystal silicon thin film formed on a substrate such as a glass and quartz
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