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  • Illumination system 10, as is disclosed in, for example, Japanese Patent Laid-open 06-349701 and the corresponding U.S. Pat. No. 5,534,970, has a structure including units such as a light source, an illuminance uniformity optical system including parts such as an optical integrator, a relay lens, a variable ND filter, a reticle blind (all of which are not shown).
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