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  • The material of the electroconductive, film 4 may be: metal such as Pd, Pt, Ru, Ag, Au, Ti, In, Cu, Cr, Fe, Zn, Sn, Ta, W and Pb; oxide such as PdO, SnO2, In3O3, PbO and Sb2O3; boride such as HfB2, ZrB2, LaB6, CeB6, YB4, GdB4; carbide such as TiC, ZrC, HFC, TaC, SiC and WC; nitride such as TiN, ZrN and HfN; semiconductor such as Si, Ge; and carbon.
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