Description
Metadata
Settings
owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
About:
isa:367727480
Sponge
Permalink
An Entity of Type :
prov:Entity
, within Data Space :
webisadb.webdatacommons.org
associated with source
dataset(s)
Type:
prov:Entity
New Facets Session with This Class
Attributes
Values
rdf:type
prov:Entity
prov:value
That is, interlayer insulating layer 17, bit line 15 and interlayer insulating layer 11 may be etched in the same etching apparatus only by changing conditions such as the etching gas.
prov:wasQuotedFrom
google.com
is
prov:wasDerivedFrom
of
isap:264105004
Alternative Linked Data Views:
ODE
Raw Data in:
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|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
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