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  • FIG. 4B is an enlarged cross sectional view of the area surrounded with dotted lines in FIG. 3A. In the case where this structure is maintained as it is, the TFT is liable to be deteriorated or broken because a voltage is applied as concentrated to an edge of the Ta layer 112 present under the anodic oxides 109 and 111 on the TFT in an on state.
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