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  • In this case, when a film of the base layer is formed on such a substrate as a quartz, an electrode is created from the third layer 12 after an Al film 52 is subsequently formed, and anodic oxidation is performed at a set voltage within an electrolyte solution such as oxalic acid, the surface of Al is initially oxidized, causing the current value to rapidly decline (at point 71 in FIG. 7).
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