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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The gate electrode layer 112 may be formed of one or more of doped poly-silicon and/or a metal, such as tungsten (W), molybdenum (Mo), titanium (Ti), tantalum (Ta), cobalt (Co), nickel (Ni) and/or a conductive metal nitride (such as TiN or WN) and/or metal silicide (such as WSi or CoSi or NiSi or TiSi) thereof.
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