Preferred perfluoroalkylalkyl silanes have the general formula Rm R'n SiX4-m-n, wherein R is a perfluoroalkylalkyl radical; m is typically one, n is typically zero or one, and m+n is not greater than 3; R' is a vinyl or alkyl radical, preferably methyl, ethyl or propyl; and X is preferably a radical such as halogen, acyloxy, and/or alkoxy.