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  • Patent US5989998 - For semiconductor devices; by plasma polymerization or oxidizing an alkoxy ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA material containing, as a main component, an organic silicon compound represented by the following general formula: R1 x Si(OR2)4-x (where R1 is a phenyl group or a vinyl group; R2 is an alkyl
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