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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • (1) a process of applying a resist composition comprising (i) a polymer, which is shown by the following general formula [1] wherein R1 is a methyl group or an ethyl group; R2 and R3 are each independently a hydrogen atom or a straight chained or branched alkyl group having 1 to 6 carbon atoms but not both R2 and R3 are hydrogen atoms; R4 is a straight chained, branched or cyclic alkyl group havin
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