als, Inc.Method of forming a titanium silicide layer on a substrateUS65343618 Ago 200118 Mar 2003Samsung Electronics Co., Ltd.Method of manufacturing a semiconductor device including metal contact and capacitorUS65343956 Mar 200118 Mar 2003Asm Microchemistry OyMethod of forming graded thin films using alternating pulses of vapor phase reactantsUS653440424 Nov 199918 Mar 2003Novellus Systems, Inc.M