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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • a second nanolaminate disposed in the integrated circuit, the second nanolaminate containing a second plurality of different insulating materials including a second region of hafnium silicon oxynitride, the second region of hafnium silicon oxynitride arranged as one or more monolayers and doped with elements or compounds other than hafnium or silicon, the second region of hafnium silicon oxynitrid
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