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  • amber; passivating the internal surface of the ALD reactor chamber by reacting the labile sites on the internal surface of the ALD reactor chamber with a compound represented by the formula: RaEXbYcZd wherein R represents C1-8 alkyl, aryl, alkaryl, C3-20 alkyl carboxylates and esters, alkyl or aryl or alkaryl mercaptides, glycolates and chelates, E is a metal or metalloid element from periodic gro
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