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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • a driving system including a driving motor and configured to drive a processing object; an energy beam irradiation device configured to irradiate an energy beam on a processing surface of the processing object driven by the driving system; a linear scale configured to generate pulse signals corresponding to travel positions along an X-direction or Y-direction of the processing object; an arithmeti
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