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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • a substrate; a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates; a rotational ring having a central opening and including a plurality of movable capacitive plates at the outer perimeter and arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates, said rotational ring being suspended over a cavity and rotatio
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