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  • 88]FIGS. 9A and 9B are a sectional view taken along the line 9A-9A and a sectional view taken along the line 9B-9B in FIG. 7; [0089]FIGS. 10A and 10B are a sectional view taken along the line 10A-10A and a sectional view taken along the line 10B-10B in FIG. 7; [0090]FIGS. 11A and 11B are perspective views of an upper face and a lower face showing an intermediate substrate 201 of a variable geometr
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