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  • Rather, it is generally advantageous to have only one proof mass in an accelerometer. [0004] A typical example of a prior art micromachined two-sensor/single proof mass accelerometer, commonly referred to as a Rectangle design, is illustrated in FIGS. 1A and 1B. The accelerometer 10 illustrated in FIGS. 1A and 1B is a miniature structure fabricated from a substrate 12 of semiconductor material by
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