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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • and said third conductive barrier layer overlies said second conductive barrier layer; at least one metal layer in contact with the third conductive barrier layer, wherein said metal layer comprises metal or metal alloy including a material selected from the group consisting of Cu or Al: wherein said first,second and third conductive barrier layers are between said at least one layer of high diel
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