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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • a substrate; a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates; an inertial mass substantially suspended over a cavity and including a central portion and a plurality of movable capacitive plates arranged to provide a capacitive coupling with said first plurality of fixed capacitive plates, said inertial mass being linearly movable relative to
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