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  • as Cu source material, and schematic cross sectional views showing modifications of a lamp heating CVD system. [0023]FIGS. 3A to 3E are cross sectional views illustrating the precesses of forming wiring, and [0024]FIG. 3F is a cross sectional view showing the structure of a MOS transistor. [0025]FIGS. 4A and 4B are a cross sectional view illustrating a Cu film forming process by resistance heatin
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