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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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prov:value
  • at least one upper metal layer on the conductive layer and comprising Ti, Ta, W, Co or Mo or an alloy or a compound of any thereof, including TaN or TiN, the at least one upper metal layer being disposed within the aperture laterally adjacent the metal spacer and having an upper surface substantially coincident with an upper surface of the dielectric layer and an uppermost extent of the metal spac
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