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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • g layer adjacent to the first to third contact holes respectively are exposed at bottoms of the grooves, each of the first to third contact sections covers at least a part of a side surface of the insulating section and at least a part of a sidewall of one of the first to third contact holes, the insulating material is an organic material, and each of the first to third cover members is spaced apa
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