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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The metal may comprise copper, tungsten, aluminum, ruthenium, platinum, titanium, or tantalum, or alloys thereof, or other suitable metals or conductive materials, and the metal nitride may be tungsten nitride, tantalum nitride, or titanium nitride.
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