Advantageously, the resistive layer is protected by a layer of dielectric, e.g. silicon dioxide or silicon nitride to reduce...http://www.google.com/patents/US5960014?utm_source=gb-gplus-sharePatent US5960014 - Thin film resistor for optoelectronic integrated circuitsAdvanced Patent SearchPublication numberUS5960014 APublication typeGrantApplication numberUS 08/977,371Publication dateSep 28, 1999F