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  • In order to minimize the electrical resistance of support arms 1706-1707, a thin (10-20 nm thick) strip (2 ??m wide) of metal, such as aluminum or nickel or titanium or other suitable metal, runs along amorphous silicon-on-nitride ramped foot 1712 onto support arm 1706 and then along one side of resistor 1704 to provide a low resistance electrical path to resistor 1704; see FIGS. 17b-c.
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