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An Entity of Type : prov:Entity, within Data Space : webisadb.webdatacommons.org associated with source dataset(s)

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  • The method according to claim 3 wherein said material is a semiconductor and said modification is drilling holes therein, cutting or machining a surface of said semiconductor, and wherein said pulse widths are less than about 10 picoseconds and pulse-separation times are less than 10 about microseconds.
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